This device uses an evaluation module of microconverters TI MSCY5, with a resolution of 24 bits, achieving the acquisition and measurement of biopotenciales in a direct way, with minimal amplification, using less circuitry, diminishing energy consumption and cost. The captured readings are wirelessly sent to a computer, where is done the processing, storage and WEB upload, information which could be accessed by cellular phone using GPRS protocol. Unable to display preview.
Download preview PDF. Skip to main content. This service is more advanced with JavaScript available. Advertisement Hide. Conference paper. Palabras claves Electrocardiography converter modulation delta sigma. When the sensor is placed in an atmospheric condition the external air pressure exceeds the internal pressure and causes the sensor to be compressed.
When the sensor is placed in a low pressure or vacuum, the internal pressure exceeds the external pressure, causing case to expand to it's maximum height or until it contacts the showerhead.
In a sense the actuator is the gas sealed within the hermetic enclosure and the signal to cause actuation is the reduced external air pressure. Portion preferably includes circuit board upon which a number of electrical components are mounted. Specifically, battery is preferably mounted on circuit board and coupled to controller via power management module Preferably, power management module is a power management integrated circuit available from Linear Technology Corporation under the trade designation LTC Controller is coupled to memory module which can take the form of any type of memory, including memory that is internal to the controller as well as memory that is external to the controller.
The internal random access memory is useful for storing volatile data relevant to program operation. These ports are preferably serial ports that facilitate communication between controller and additional devices.
Specifically, serial port is coupled to radio-frequency module such that controller is communicatively coupled with external devices via radio-frequency module In one preferred embodiment, radio-frequency module operates in accordance with the well-known Bluetooth standard, Bluetooth core specification version 1.
Additionally, other forms of wireless communication can be used in addition or instead of module Suitable examples of such wireless communication include any other form of radio-frequency communication, acoustic communication, infrared communication or even communication employing magnetic induction. Preferably, one or more capacitance plates are operably disposed to sense one or more distances relative to an object of interest in a semiconductor processing system in accordance with an embodiment of the present invention.
Additionally, embodiments of the present invention can employ other suitable sensors as may be desired. Examples of additional sensors include thermometers, accelerometers, inclinometers, compasses magnetic field direction detectors , light detectors, pressure detectors, electric field strength detectors, magnetic field strength detectors, acoustic detectors, humidity detectors, chemical moiety activity detectors, or any other type of detector as may be appropriate.
In operation, controller interacts with measurement circuitry 18 , which preferably includes a known sigma-delta analog-digital converter to determine one or more capacitance values. The capacitance values, as described above, are indicative of a distance between the sensor and an object of interest within a semiconductor-processing tool.
Additionally, or alternatively, the sensed capacitance may be indicative of a distance of extension required by the sensor to contact the object of interest.
In this regard, the distance measurements can be used to provide an indication of parallelism. Accordingly, when the sensor rests upon a platen, the multiple distance measurements provide an indication of parallelism of the platen itself relative to the showerhead.
If parallelism itself were the only quantity of interest, the various capacitance measurements themselves could be compared with one another to directly provide an indication of parallelism.
However, if knowledge of the distance from the platen to the showerhead is also desired, a priori information stored within memory is used by controller to calculate the distance. For example, in embodiments where the capacitive plates are disposed on a top surface of the sensor, the distance from the sensor to the showerhead is added to the thickness of the sensor itself by controller to provide an overall distance from the platen to the showerhead.
However, FIG. Interface can display the relative position or parallelism, or relative angle of the surfaces graphically, numerically, or both. The degree of parallelism may be indicated numerically, or by the use of a bubble-level metaphor, as illustrated in FIG. The position of circle within circle illustrates, in two dimensions, the relative inclination of the surface to which the sensor is exposed. When the surfaces are parallel in both dimensions, circle is centered within circle Otherwise, circle is shown to one side of center, indicating the side where the surfaces are farthest apart, with the distance of small circle from the center of large circle indicating the relative inclination of the surfaces.
In this case there may be selectable scaling of the relative inclination. For example, box within window shows the relative size of window for scaling purposes. Thus, as inclination becomes more and more pronounced, the distance of circle from the center of circle is window may become extreme, but the relative size of circles and will remain the same with the size of box varying accordingly.
An alternate method of displaying relative inclination provides a circle with a color gradient across the circle. The direction of the gradient indicates the direction of maximum inclination, which may also be indicated by a superimposed line, and the degree of the gradient indicating the relative inclination. For example, in the case of a severe inclination the colors may range from yellow to blue depending on the color spectrum that is chosen , while a minor inclination may be displayed as a gradient from orange to red.
When the surfaces are parallel, the color is uniform, with no gradient. Again, scaling may be selected. A user or technician of interface can utilize the information provided therein to make informed judgments with respect to machine adjustments during the setup of semiconductor processing tool. For example, the technician can adjust various mechanical settings on the platen to raise or lower certain portions in order to correctly set the distance from the platen to the showerhead as well as the parallelism of the platen and showerhead.
In this manner, at least some semiconductor processing adjustments could be performed automatically based upon wireless information conveyed from the capacitive distance sensor. Although the present invention has been described with reference to preferred embodiments, workers skilled in the art will recognize that changes may be made in form and detail without departing from the spirit and scope of the invention.
A sensor for sensing a distance to an object of interest within a semiconductor processing chamber, the sensor including: a housing;. The sensor of claim 1 , wherein the at least one capacitive plate includes an even number of capacitive plates.
The sensor of claim 2 , wherein a first half of the even number of capacitive plates are driven to a positive excitation voltage, and the other half of the even positive number of capacitive plates are driven to a negative excitation voltage.
The sensor of claim 2 , wherein a first capacitive plate is coupled to a surface that is extendable to the object of interest, and a second capacitive plate is fixed within the housing, and wherein a capacitor is formed between the first and second plates, the capacitor having a capacitance that varies with the degree to which the surface is extended.
The sensor of claim 4 , and further comprising an actuator coupled to the surface, the actuator being coupled to the controller to provide a selectable degree of extension.
The sensor of claim 4 , wherein the sensor is hermetically sealed and the expandable surface is compressed, or expanded, in response to atmospheric pressure, or lack thereof, external to the sensor. The sensor of claim 2 , wherein the even number is 2. The sensor of claim 1 , wherein the measurement circuitry includes a sigma-delta modulator. The sensor of claim 1 , wherein the indication is parallelism.
The sensor of claim 9 , wherein the indication is provided in a user interface depicting a bubble-like metaphor. The sensor of claim 1 , wherein the indication is distance from a platen to a showerhead. The sensor of claim 1 , wherein the object of interest is a showerhead within the semiconductor processing chamber. The sensor of claim 1 , wherein the wireless communication circuitry is radio-frequency communication circuitry.
The sensor of claim 1 , wherein the controller is configured to compute a distance between the object of interest and the surface on which the sensor rests based upon the measured capacitance and the known fixed offset distance between the at least one capacitive plate and the surface upon which the sensor rests. The sensor of claim 1 , wherein the sensor is embodied within a physical package that is similar to substrates that are processed by the processing chamber.
A method of sensing a distance to an object of interest within a semiconductor processing chamber, the method comprising: bringing a plurality of capacitive plates into proximity of the object of interest;.
The method of claim 16 , wherein the indication is distance to the object of interest. The method of claim 16 , wherein the indication is parallelism. The method of claim 18 , wherein the parallelism is depicted as a bubble-like metaphor. The method of claim 16 , wherein the indication is provided wirelessly. The method of claim 16 , wherein the object of interest is a showerhead within the semiconductor processing chamber.
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